Work function of Cu3Ge thin film
نویسندگان
چکیده
منابع مشابه
Nanoscale electrical properties of epitaxial Cu3Ge film
Cu3Ge has been pursued as next-generation interconnection/contact material due to its high thermal stability, low bulk resistivity and diffusion barrier property. Improvements in electrical performance and structure of Cu3Ge have attracted great attention in the past decades. Despite the remarkable progress in Cu3Ge fabrication on various substrates by different deposition methods, polycrystall...
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We report an investigation on the optical properties of Cu3Ge thin films displaying very high conductivity, with thickness ranging from 200 to 2000 Å, deposited on Ge substrates. Reflectance, transmittance, and ellipsometric spectroscopy measurements were performed at room temperature in the 0.01–6.0, 0.01–0.6, and 1.4–5.0 eV energy range, respectively. The complex dielectric function, the opti...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2016
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927616009119